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Interpreted as:
title:(Fabrication AND of AND 3D AND micro AND and AND nanostructures AND for AND MEMS AND and AND MOEMS\: AND an AND approach AND based AND on AND combined AND lithographies)
Suggestions: Include records that partially match the query
Fabrication of 3D micro and nanostructures for MEMS and MOEMS: an approach based on combined lithographies 10.1088/1742-6596/34/1/150
Journal of Physics: Conference Series — 2006, Volume 34, pp. 904-911
Year: 2006
Language: Undetermined
Year: 2006
Language: English