Conference paper · Journal article
Multivariate data analysis of process control data from neutron transmutation doping of silicon
In
Chemometrics and Intelligent Laboratory Systems
—
1994, Volume 23, Issue 1, pp. 191-196
Abstract
Final resistivities obtained by neutron transmutation doping (NTD) of silicon can be measured only after an annealing process has been carried out at the manufacturer's plant. The reactor centre carrying out the neutron doping process by irradiation under selected conditions must control the process by indirect measurement of the product quality.
The method of partial least squares was used to identify important parameters for improving the quality of the NTD-silicon, as well as for predicting the final quality data observed by the customer.
| Language: | English |
|---|---|
| Year: | 1994 |
| Pages: | 191-196 |
| Proceedings: | 3rd Scandinavian Symposium on Chemometrics |
| ISSN: | 18733239 and 01697439 |
| Types: | Conference paper and Journal article |
| DOI: | 10.1016/0169-7439(93)E0079-J |
