Conference paper
Circular Piezoelectric Accelerometer for High Band Width Application
In
Ieee Sensors 2009
—
2009, pp. 475-478
Abstract
An uniaxial bulk-micromachined piezoelectric MEMS accelerometer intended for high bandwidth application is fabricated and characterized. A circular seismic mass (radius = 1200 ¿m) is suspended by a 20 ¿m thick annular silicon membrane (radius = 1800 ¿m). A 24 ¿m PZT screen printed thick film is used as the sensing material on top of the silicon membrane.
Accelerations in the out of plane direction induce a force on the seismic mass bending the membrane and a potential difference is measured in the out of plane direction of the stressed PZT. A resonance frequency of 23.50 kHz, a charge sensitivity of 0.23 pC/g and a voltage sensitivity of 0.24 mV/g are measured.
| Language: | English |
|---|---|
| Publisher: | IEEE |
| Year: | 2009 |
| Pages: | 475-478 |
| Proceedings: | 8th IEEE Conference on Sensors |
| ISBN: | 1424445485 , 1424453356 , 9781424445486 and 9781424453351 |
| ISSN: | 21689229 and 19300395 |
| Types: | Conference paper |
| DOI: | 10.1109/ICSENS.2009.5398277 |
| ORCIDs: | Thomsen, Erik Vilain |
