Journal article
Test function for the determination of plasma parameters by electric probes
A “test function” sensitive to the electron distribution function is used to determine the plasma parameters by Langmuir probes. It was successfully applied to determine the parameters of the hot-electron group in a multipolar, magnetically confined Ar plasma, even when the ratio of bulk to hot-electron densities is greater than 50.
The method can also be used to measure the positive-ion density from a probe potential slightly below the plasma potential, and to estimate the electron and negative-ion density and temperature in an Ar/SF6 plasma. A characteristic plasma potential is also introduced and is correlated with the plasma parameters.
Language: | Undetermined |
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Publisher: | American Institute of Physics |
Year: | 1999 |
Pages: | 58-62 |
ISSN: | 10897623 and 00346748 |
Types: | Journal article |
DOI: | 10.1063/1.1149542 |