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10 items by relevance
1 Conference paper

Static contact micro four-point probes with

Petersen, Dirch Hjorth; Hansen, Ole; Hansen, Torben Mikael; Petersen, Peter Rasmus Ebsen; Bøggild, Peter

Mne 33rd International Conference on Micro- and Nano-engineering — 2007, pp. 409-410

Year: 2007

Language: English

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ch ifle oak gdnjpmb
2 Journal article

Static Contact Micro Four-Point Probes with <11 nm positioning repeatability

Petersen, Dirch Hjorth; Hansen, Ole; Hansen, Torben Mikael; Petersen, Peter Rasmus Ebsen; Bøggild, Peter

Microelectronic Engineering — 2008, Volume 85, Issue 5-6, pp. 1092-1095

In recent years micro four-point probes (M4PP) have proved a powerful tool for electrical characterization of thin film due to a high surface sensitivity and spatial resolution. However, a common problem is the probe lifetime which is limited mainly due to mechanical wear of the electrode material

Year: 2008

Language: English

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apc gimbo dhljeknf

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