Journal article
Vapor Phase Self-assembled Monolayers for Anti-stiction Applications in MEMS
Microreactors, Department of Micro- and Nanotechnology, Technical University of Denmark1
Department of Micro- and Nanotechnology, Technical University of Denmark2
Center for Individual Nanoparticle Functionality, Centers, Technical University of Denmark3
Center for Nanoteknologi, Centers, Technical University of Denmark4
We have investigated the anti-stiction performance of self-assembled monolayers (SAMs) that were grown in vapor phase from six different organosilane precursors: CF3(CF2)5(CH2)2SiCl3 (FOTS), CF3(CF2)5(CH2)2Si(OC2H5)3 (FOTES), CF3(CF2)5(CH2)2Si(CH3)Cl2 (FOMDS), CF3(CF2)5(CH2)2Si(CH3)2Cl (FOMMS), CF3(CF2)7(CH2)2SiCl3 (FDTS), and CH3(CH2)17(CH2)2SiCl3 (OTS).
The SAM coatings that were grown on silicon substrates were characterized with respect to static contact angle, surface energy, roughness, nanoscale adhesive force, nanoscale friction force, and thermal stability. The best overall anti-stiction performance was achieved using FDTS as precursor for the SAM growth, but all coatings show good potential for solving in-use stiction problems in microelectromechanical systems devices.
Language: | English |
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Publisher: | IEEE |
Year: | 2007 |
Pages: | 1451-1460 |
ISSN: | 19410158 and 10577157 |
Types: | Journal article |
DOI: | 10.1109/JMEMS.2007.904342 |
ORCIDs: | Hansen, Ole |
Adhesion Coatings Friction MEMS Micromechanical devices Microstructure Nanoelectromechanical systems Nanostructures Self-assembly Silicon Thermal force Thermal stability anti-stiction anti-stiction applications friction microelectromechanical systems micromechanical devices monolayers nanoscale adhesive force nanoscale friction force organosilane precursors roughness self-assembled monolayer (SAM) self-assembly silicon substrates static contact angle stiction substrates surface energy thermal stability vapor phase vapor-phase self-assembled monolayers