Conference paper
Dense high aspect ratio pillar arrays for carbon MEMS electrodes
Department of Micro- and Nanotechnology, Technical University of Denmark1
Nanoprobes, Department of Micro- and Nanotechnology, Technical University of Denmark2
Technical University of Denmark3
Bioanalytics, Department of Micro- and Nanotechnology, Technical University of Denmark4
CAPRES A/S5
École polytechnique6
University of California at Irvine7
University of Canterbury8
Lund University9
Language: | English |
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Year: | 2012 |
Proceedings: | 38th International Conference on Micro and Nano Engineering |
Types: | Conference paper |
ORCIDs: | Heiskanen, Arto , Rindzevicius, Tomas , Boisen, Anja , Emnéus, Jenny and Keller, Stephan Sylvest |