Conference paper
Broadband antireflection nanodome structures on SiC substrate
Department of Photonics Engineering, Technical University of Denmark1
Structured Electromagnetic Materials, Department of Photonics Engineering, Technical University of Denmark2
Fiber Sensors & Supercontinuum, Department of Photonics Engineering, Technical University of Denmark3
Diode Lasers and LED Systems, Department of Photonics Engineering, Technical University of Denmark4
Nanodome structures are demonstrated on the SiC substrate by using nanosphere lithography and dry etching. Significant surface antireflection has been observed over a broad spectral range from 400 nm to 1600 nm.
| Language: | English |
|---|---|
| Publisher: | IEEE |
| Year: | 2013 |
| Pages: | 39-40 |
| Proceedings: | 2013 10th IEEE International Conference on Group IV Photonics |
| ISBN: | 1467358029 , 1467358037 , 1467358045 , 9781467358026 , 9781467358033 and 9781467358040 |
| ISSN: | 1949209x and 19492081 |
| Types: | Conference paper |
| DOI: | 10.1109/Group4.2013.6644482 |
| ORCIDs: | Ou, Yiyu , Zhu, Xiaolong , Xiao, Sanshui and Ou, Haiyan |
Arrays Broadband communication Etching Nanostructures Reflectivity SiC SiC substrate Silicon carbide antireflection coatings broadband antireflection nanodome structures dry etching etching nanolithography nanophotonics nanosphere lithography sub-wavelength material surface antireflection wavelength 400 nm to 1600 nm
