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Conference paper

Deep silica and silicon etching in silica-on-silicon waveguide technology

In European Conference on Integrated Optics — 2005, pp. 518-521

By Ou, Haiyan1,2; Rottwitt, Karsten1,2

From

Fibers & Nonlinear Optics, Department of Photonics Engineering, Technical University of Denmark1

Department of Photonics Engineering, Technical University of Denmark2

Language: English
Year: 2005
Pages: 518-521
Proceedings: 12th European Conference on Integrated Optics
Journal subtitle: Proceedings
Types: Conference paper
ORCIDs: Ou, Haiyan and Rottwitt, Karsten

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