Journal article
Contactless graphene conductance measurements: the effect of device fabrication on terahertz time-domain spectroscopy
Department of Micro- and Nanotechnology, Technical University of Denmark1
Nanocarbon, Department of Micro- and Nanotechnology, Technical University of Denmark2
Department of Photonics Engineering, Technical University of Denmark3
Center for Nanostructured Graphene, Centers, Technical University of Denmark4
We perform contactless full-wafer maps of the electrical conductance of a 4-inch wafer of single-layer CVD graphene using terahertz time-domain spectroscopy both before and after deposition of metal contacts and fabrication of devices via laser ablation. We find that there is no significant change in the measured conductance of graphene before and after device fabrication.
We also show that precise terahertz time-domain spectroscopy can be performed when the beam spot is at sufficient distance (>1.2 mm) from metal contacts.
| Language: | English |
|---|---|
| Publisher: | Inderscience Publishers |
| Year: | 2016 |
| Pages: | 591-596 |
| ISSN: | 17418151 and 14757435 |
| Types: | Journal article |
| DOI: | 10.1504/IJNT.2016.079660 |
| ORCIDs: | Bøggild, Peter , Jepsen, Peter Uhd and Petersen, Dirch Hjorth |
