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DTU Findit
Boolean: (bicycle AND helmet) OR (head AND protection) (always group AND in parenthesis)
Title: title:(climate change)
Author: author:("bohr niels" OR "bohr n") (avoid only full first name)
Phrase: "water pump control" (does not work with wildcards)
Wildcards: wom?n pharm*

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Conference paper

Deep-UV-Lithography: Principles, Optimization, and Simulation

In Book of Abstracts. Dtu's Sustain Conference 2015 — 2015

By Keil, Matthias1; Møller, Niels Peder1; Khomtchenko, Elena1; Johansen, Leif Steen1

From

DTU Danchip, Technical University of Denmark1

Language: English
Publisher: Technical University of Denmark
Year: 2015
Proceedings: DTU Sustain Conference 2015
Types: Conference paper
ORCIDs: Keil, Matthias and Johansen, Leif Steen

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Analysis