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Author:
Larsen
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title:(Phosphorus AND diffusion AND in AND float AND zone AND silicon AND crystal AND growth)
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Printed book
Phosphorus diffusion in float zone silicon crystal growth
IMM, — 2000, pp. 119 s.
Year: 2000
Language: English
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PhD Thesis
Phosphorus diffusion in float zone silicon crystal growth
This Ph.D thesis encompasses a global numerical simulation of the needle-eye oat zone process, used to grow silicon single crystals. The numerical models includes coupled electromagnetic and free surface models and a global heat transfer model, with moving boundaries. An axisymmetric uidow model
Year: 2000
Language: English
