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Conference paper

A Novel Ring Shaped Photodiode for Reflectance Pulse Oximetry in Wireless Applications

From

MEMS-AppliedSensors, Department of Micro- and Nanotechnology, Technical University of Denmark1

Department of Micro- and Nanotechnology, Technical University of Denmark2

We present a pulse oximeter for use in home-care applications in a sticking patch with integrated electronics. The core in the pulse oximeter is a large ring shaped backside silicon pn photodiode placed around a Ledtronics dual LED with wavelengths of 660 nm and 940 nm. The concentric photodiode gives optimal gathering of light and thereby enabling lower LED drive currents and lower power consumption.

To further optimize the photodiode a two layer SiO2/SiN interference filter is employed yielding 98% transmission at the wavelengths of the LED and damping of other wavelengths. The presented photodiode has an inner-outer radius of 3.29 -4.07 mm and an area of 18 mm2 , however, photodiodes with ring center radii ranging from 2.8 -4.9 mm have been fabricated.

Using the pulse oxymetry sensor photoplethysmograms clearly showing the cardiovascular cycle are recorded. An on-chip integrated Au thermistor for surface body temperature measurements is found to have a repeatability of plusmn0.26degC.

Language: English
Publisher: IEEE
Year: 2007
Pages: 596-599
Proceedings: IEEE Sensors 2007
ISBN: 1424412617 , 1424412625 , 9781424412617 and 9781424412624
ISSN: 21689229 and 19300395
Types: Conference paper
DOI: 10.1109/ICSENS.2007.4388469
ORCIDs: 0000-0002-2092-4791 , Birkelund, Karen and Thomsen, Erik Vilain

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