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Conference paper

20 nm Nanoimprint Lithography Stamps RIE-Etched in Silicon Using Carbon Nanotubes as Etch Masks

From

Department of Micro- and Nanotechnology, Technical University of Denmark1

Lab-on-a-Chip, Department of Micro- and Nanotechnology, Technical University of Denmark2

Nanointegration, Department of Micro- and Nanotechnology, Technical University of Denmark3

Language: English
Year: 2005
Proceedings: Material Research Society Annual Meeting
Types: Conference paper
ORCIDs: Kristensen, Anders and Bøggild, Peter

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