Journal article
Epoxy based photoresist/carbon nanoparticle composites
Nanoprobes Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark1
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
Department of Micro- and Nanotechnology, Technical University of Denmark3
We have fabricated composites of SU-8 polymer and three different types of carbon nanoparticles (NPs) using ultrasonic mixing. Structures of composite thin films have been patterned on a characterization chip with standard UV photolithography. Using a four-point bending probe, a well defined stress is applied to the composite thin film and we have demonstrated that the composites are piezoresistive.
Stable gauge factors of 5-9 have been measured, but we have also observed piezoresistive responses with gauge factors as high as 50. As SU-8 is much softer than silicon and the gauge factor of the composite material is relatively high, carbon nanoparticle doped SU-8 is a valid candidate for the piezoresistive readout in polymer based cantilever sensors, with potentially higher sensitivity than silicon based cantilevers.
Language: | English |
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Year: | 2008 |
Pages: | 1831-1836 |
ISSN: | 18791050 and 02663538 |
Types: | Journal article |
DOI: | 10.1016/j.compscitech.2008.01.017 |
ORCIDs: | Thomsen, Erik Vilain and Boisen, Anja |