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Conference paper

Recent advances in ice lithography for 3D nanofabrication

By Zhao, Ding1,2,3; Elsukova, Anna1,2,3; Batzer, Marietta4; Shields, Brendan J.4; Maletinsky, Patrick4; Beleggia, Marco1,2,3; Han, Anpan5

From

National Centre for Nano Fabrication and Characterization, Technical University of Denmark1

Nanocharacterization, National Centre for Nano Fabrication and Characterization, Technical University of Denmark2

Electron matter interaction, Nanocharacterization, National Centre for Nano Fabrication and Characterization, Technical University of Denmark3

University of Basel4

Department of Mechanical Engineering, Technical University of Denmark5

Language: English
Year: 2019
Proceedings: 45<sup>th</sup> International conference on Micro and Nano Engineering
Types: Conference paper
ORCIDs: Zhao, Ding , Beleggia, Marco and Han, Anpan
Keywords

3D nanofabrication Additive manufacturing Ice lithography Organic ice

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