Query: title:(Measurement noise of a point autofocus surface topography instrument), Author: Feng

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title:(Measurement noise of a point autofocus surface topography instrument) Author: Feng

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title:(Measurement AND noise AND of AND a AND point AND autofocus AND surface AND topography AND instrument)

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10 items by relevance

1 Conference paper

Measurement noise of a point autofocus surface topography instrument

Feng, Xiaobing; Quagliotti, Danilo; Maculotti, Giacomo; P. Syam, Wahyudin; Tosello, Guido; Hansen, Hans N.; et al. (2 more)

Optical instruments for areal topography measurement can be especially sensitive to noise when scanning is required. Such noise has different sources, including those internally generated and external sources from the environment.

Year: 2017

Language: English

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2 Journal article

Noise evaluation of a point autofocus surface topography measuring instrument 10.1088/1361-6501/aab528