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Journal article

Thin film Ag superlens towards lab-on-a-chip integration

By Jeppesen, Claus1,2,3; Nielsen, Rasmus Bundgaard4,5; Boltasseva, Alexandra4,5; Xiao, Sanshui5,6; Mortensen, Asger5,6; Kristensen, Anders1,2,3

From

NSE-Optofluidics Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark1

NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2

Department of Micro- and Nanotechnology, Technical University of Denmark3

Metamaterials, Department of Photonics Engineering, Technical University of Denmark4

Department of Photonics Engineering, Technical University of Denmark5

Structured Electromagnetic Materials, Department of Photonics Engineering, Technical University of Denmark6

A thin metal film near-field superlens, as originally suggested by Pendry and realized by Fang et al. and Melville et al., is investigated with emphasis on materials suitable for integration on a lab-on-a-chip platform. A chemically resistant cyclo-olefin copolymer (COC), mr-I-T85 from microresist technology, is applied as dielectric matrix/spacer for an Ag thin film superlens.

The superlens successfully resolves 80 nm half-pitch gratings when illuminated with UV radiation at a free space wavelength of 365 nm. The superlens design, fabrication and characterization is discussed.

Language: English
Publisher: The Optical Society
Year: 2009
Pages: 22543-22552
ISSN: 10944087
Types: Journal article
DOI: 10.1364/OE.17.022543
ORCIDs: Xiao, Sanshui , Mortensen, Asger and Kristensen, Anders
Keywords

Computer-Aided Design Equipment Design Equipment Failure Analysis Lenses Membranes, Artificial Microfluidic Analytical Techniques Refractometry Silver Systems Integration

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