Journal article
Electronic scheme for multiplexed dynamic behavior excitation and detection of piezoelectric silicon-based micromembranes
Nanoprobes Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark1
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
Department of Micro- and Nanotechnology, Technical University of Denmark3
A new concept for a precise compensation of the static capacitance of piezoelectric silicon-based micromembranes is proposed. Combining analog and digital field-programmable gate array hardware elements with specific software treatment, this system enables the parallel excitation and detection of the resonant frequencies (and the quality factors) of matrices of piezoelectric micromembranes integrated on the same chip.
The frequency measurement stability is less than 1 ppm (1-2 Hz) with a switching capability of 4 micromembranes/sec and a measurement bandwidth of 1.5 MHz. The real-time multiplexed tracking of the resonant frequency and quality factor on several micromembranes is performed in different liquid media, showing the high capability of measurement on dramatically attenuated signals.
Prior to these measurements, calibration in air is done making use of silica microbeads successive depositions onto piezoelectric membranes surface. The mass sensitivity in air is, thus, estimated at, in excellent agreement with the theoretical corresponding value.
| Language: | English |
|---|---|
| Publisher: | IEEE |
| Year: | 2008 |
| Pages: | 210-217 |
| ISSN: | 15581748 and 1530437x |
| Types: | Journal article |
| DOI: | 10.1109/JSEN.2007.913021 |
Capacitance Field programmable analog arrays Field programmable gate arrays Frequency measurement Hardware Mass sensitivity Q factor Q-factor Resonant frequency Software quality Software systems Stability electronic scheme field programmable gate arrays field-programmable gate array hardware elements frequency 1.5 MHz frequency measurement stability microelectromechanical systems (MEMS) multiplexed detection multiplexed dynamic behavior excitation piezoelectric piezoelectric devices piezoelectric silicon-based micromembranes quality factor real-time multiplexed tracking resonant frequency detection static capacitance switching capability
