Journal article
Excitation and detection of silicon-based micro-mechanical resonators
Language: | English |
---|---|
Year: | 1997 |
Pages: | 521-540 |
ISSN: | 24350869 and 09144935 |
Types: | Journal article |
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Journal article
Language: | English |
---|---|
Year: | 1997 |
Pages: | 521-540 |
ISSN: | 24350869 and 09144935 |
Types: | Journal article |
Analysis