Conference paper
Mechanical impact of coatings on membranes
The mechanical impact of coatings containing residual stress on membranes is investigated. Closed-form formulas describing this impact are presented and verified using both finite element modeling and physical experiments. Theory and experiments are in good agreement. Thus, a simple tool for design of coated pressure sensors is provided.
| Language: | English |
|---|---|
| Publisher: | IEEE |
| Year: | 2000 |
| Pages: | 731-734 |
| Proceedings: | 14th IEEE International Conference on Micro Electro Mechanical Systems |
| ISBN: | 0780359984 and 9780780359987 |
| ISSN: | 10846999 |
| Types: | Conference paper |
| DOI: | 10.1109/MEMSYS.2001.906553 |
Biomembranes Capacitive sensors Coatings Finite element methods Mechanical sensors Piezoresistive devices Protection Residual stresses Solid modeling Thin film sensors closed-form formulas coated pressure sensors finite element modeling impact (mechanical) internal stresses mechanical impact membranes physical experiments piezoresistive devices pressure sensors protective coatings residual stress
