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10 items by relevance
1 Conference paper

Combined electron beam lithography and UV lithography in SU-8

Gersborg-Hansen, Morten; Thamdrup, Lasse Højlund; Mironov, A.; Kristensen, Anders

Proceedings of the 32nd International Conference on Micro and Nano Engineering — 2006

Year: 2006

Language: English

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leh mbgai pdfcj kno
2 Journal article

Combined electron beam and UV lithography in SU-8

Gersborg-Hansen, Morten; Thamdrup, Lasse Højlund; Mironov, Andrej; Kristensen, Anders

Microelectronic Engineering — 2007, Volume 84, Issue 5-8, pp. 1058-1061

We present combined electron beam and UV lithography (CEUL) in SU-8 as a fast and flexible lithographic technique for prototyping of functional polymer devices and pattern transfer applications. CEUL is a lithographic technique suitable for defining both micrometer and nanometer scale features

Year: 2007

Language: English

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de mjkoibhglfnpca

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