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Journal article

MEMS Bragg grating force sensor

By Reck, Kasper1; Thomsen, Erik Vilain1,2,3; Hansen, Ole1

From

Department of Micro- and Nanotechnology, Technical University of Denmark1

MEMS-AppliedSensors Group, MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark2

MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark3

Center for Individual Nanoparticle Functionality, Centers, Technical University of Denmark4

We present modeling, design, fabrication and characterization of a new type of all-optical frequency modulated MEMS force sensor based on a mechanically amplified double clamped waveguide beam structure with integrated Bragg grating. The sensor is ideally suited for force measurements in harsh environments and for remote and distributed sensing and has a measured sensitivity of -14 nm/N, which is several times higher than what is obtained in conventional fiber Bragg grating force sensors. © 2011 Optical Society of America.

Language: English
Year: 2011
Pages: 19190-19198
ISSN: 10944087
Types: Journal article
DOI: 10.1364/OE.19.019190
ORCIDs: Thomsen, Erik Vilain and Hansen, Ole
Keywords

All-optical devices Integrated optics devices Optomechanics

Other keywords

Equipment Design Fiber Optic Technology Micro-Electrical-Mechanical Systems Optical Fibers Refractometry Reproducibility of Results Transducers

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