About

Log in?

DTU users get better search results including licensed content and discounts on order fees.

Anyone can log in and get personalized features such as favorites, tags and feeds.

Log in as DTU user Log in as non-DTU user No thanks

DTU Findit
Boolean: (bicycle AND helmet) OR (head AND protection) (always group AND in parenthesis)
Title: title:(climate change)
Author: author:("bohr niels" OR "bohr n") (avoid only full first name)
Phrase: "water pump control" (does not work with wildcards)
Wildcards: wom?n pharm*

More help on how to search

Flexible matching

About search syntax

Search syntax Advanced
Close advanced
{{problem}}
By field Using AND/OR By author
This tool can help you build boolean queries suitable for doing a broad search for different synonyms or spellings of each word. Start via the drop-down below or just start typing in the search field.
{{ row.typeTitle }}: ( )

Since our index often lack the full first name of people it can be difficult to correctly search by author.

Fill in the fields and let us help you build a good query:

If you need to find everything possible, consider only searching by last name.

Use "Starting year" to ignore publications out of year range.

More...

Journal article

Fabrication of integrated metallic MEMS devices

By Yalcinkaya, Arda Deniz1; Ravnkilde, Jan Tue1; Hansen, Ole1

From

Department of Micro- and Nanotechnology, Technical University of Denmark1

A simple and complementary metal oxide semiconductor (CMOS) compatible fabrication technique for microelectromechanical (MEMS) devices is presented. The fabrication technology makes use of electroplated metal layers. Among the fabricated devices, high quality factor microresonators are characterised with respect to the quality factor.

Language: English
Year: 2002
Pages: 1526-1527
ISSN: 1350911x and 00135194
Types: Journal article
DOI: 10.1049/el:20021032
ORCIDs: Hansen, Ole

DTU users get better search results including licensed content and discounts on order fees.

Log in as DTU user

Access

Analysis