Journal article
V-groove plasmonic waveguides fabricated by nanoimprint lithography
Nanophotonics, Department of Photonics Engineering, Technical University of Denmark1
Department of Photonics Engineering, Technical University of Denmark2
Lab-on-a-Chip, Department of Micro- and Nanotechnology, Technical University of Denmark3
Department of Micro- and Nanotechnology, Technical University of Denmark4
Propagation of channel plasmon-polariton modes in the bottom of a metal V groove has been recently demonstrated. It provides a unique way of manipulating light at nanometer length scale. In this work, we present a method based on nanoimprint lithography that allows parallel fabrication of integrated optical devices composed of metal V grooves.
This method represents an improvement with respect to previous works, where the V grooves were fabricated by direct milling of the metal, in terms of robustness and throughput. © 2007 American Vacuum Society
| Language: | English |
|---|---|
| Publisher: | American Vacuum Society |
| Year: | 2007 |
| Pages: | 2649-2653 |
| ISSN: | 15208567 , 10711023 and 21662754 |
| Types: | Journal article |
| DOI: | 10.1116/1.2779041 |
| ORCIDs: | Kristensen, Anders |
