Conference paper
Precision of single-engage micro Hall effect measurements
Department of Micro- and Nanotechnology, Technical University of Denmark1
Department of Physics, Technical University of Denmark2
Surface Physics and Catalysis, Department of Physics, Technical University of Denmark3
Silicon Microtechnology, Department of Micro- and Nanotechnology, Technical University of Denmark4
CAPRES A/S5
South China University of Technology6
Nanointegration, Department of Micro- and Nanotechnology, Technical University of Denmark7
Recently a novel microscale Hall effect measurement technique has been developed to extract sheet resistance (RS), Hall sheet carrier density (NHS) and Hall mobility (μH) from collinear micro 4-point probe measurements in the vicinity of an insulating boundary [1]. The technique measures in less than a minute directly the local transport properties, which enables in-line production monitoring on scribe line test pads [2].
To increase measurement speed and reliability, a method in which 4-point measurements are performed using two different electrode pitches has been developed [3]. In this study we calculate the measurement error on RS, NHS and μH resulting from electrode position errors, probe placement, sample size and Hall signal magnitude.
We show the relationship between measurement precision and electrode pitch, which is important when down-scaling the micro 4-point probe to fit smaller test pads. The study is based on Monte Carlo simulations.
| Language: | English |
|---|---|
| Publisher: | IEEE |
| Year: | 2014 |
| Pages: | 1-4 |
| Proceedings: | 14th International Workshop on Junction Technology |
| ISBN: | 1479936278 , 1479936286 , 9781479936274 and 9781479936281 |
| Types: | Conference paper |
| DOI: | 10.1109/IWJT.2014.6842029 |
| ORCIDs: | Hansen, Ole and Petersen, Dirch Hjorth |
