Journal article
Cantilever based mass sensor with hard contact readout
Bioprobes, Department of Micro- and Nanotechnology, Technical University of Denmark1
Department of Micro- and Nanotechnology, Technical University of Denmark2
MicroNano Tribology and Modeling, Department of Micro- and Nanotechnology, Technical University of Denmark3
Center for Individual Nanoparticle Functionality, Centers, Technical University of Denmark4
We present a method for microcantilever resonant frequency detection. We measure the direct current from an intermittent contact once every vibration cycle between the conducting cantilever and a counterelectrode at a low bias voltage with respect to the cantilever, while the excitation frequency and amplitude are varied.
The result is an almost "digital" detection of the resonant frequency. A relative frequency resolution Delta f/f of 1/80 000 with high signal to noise ratio in ambient conditions is demonstrated. The detection method can be applied to portable sensor systems with very high frequency nanoelectromechanical cantilevers using simple off-chip electronics.
| Language: | English |
|---|---|
| Publisher: | American Institute of Physics |
| Year: | 2006 |
| Pages: | 264104 |
| ISSN: | 10773118 and 00036951 |
| Types: | Journal article |
| DOI: | 10.1063/1.2217161 |
| ORCIDs: | Hansen, Ole and Boisen, Anja |
