Conference paper
Advances in the fabrication of cantilever-based sensors with the polymer SU-8
Nanoprobes Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark1
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
Department of Micro- and Nanotechnology, Technical University of Denmark3
Language: | English |
---|---|
Year: | 2008 |
Proceedings: | 34th International Conference on Micro and Nano Engineering |
Types: | Conference paper |
ORCIDs: | Keller, Stephan Urs and Boisen, Anja |