Query: title:(High mass and spatial resolution mass sensor based on resonating nano-cantilevers integrated with CMOS), Author: Davis

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title:(High mass and spatial resolution mass sensor based on resonating nano-cantilevers integrated with CMOS) Author: Davis

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title:(High AND mass AND and AND spatial AND resolution AND mass AND sensor AND based AND on AND resonating AND nano-cantilevers AND integrated AND with AND CMOS)

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1 Book chapter

High Mass and Spatial Resolution Mass Sensor based on Resonating Nano-Cantilevers Integrated with CMOS 10.1007/978-3-642-59497-7_16

Davis, Z. J.; Abadal, G.; Helbo, B.; Hansen, O.; Campabadal, F.; Pérez-Murano, F.; et al. (5 more)

Transducers ’01 Eurosensors Xv — 2001, pp. 72-75

We report on the fabrication and characterization of a mass-sensor device consisting of a resonating cantilever with nanometer-scale dimensions and an integrated CMOS circuit. The characterization of the oscillation amplitude and resonant frequency of the cantilever has been performed in air

Year: 2001

Language: English

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2 Conference paper

High mass and spatial resolution mass sensor based on resonating nano-cantilevers integrated with CMOS