Low-energy, turning microvalve with high-pressure seals: scaling of friction

We present the design, fabrication, testing and scaling characteristics of a silicone-based turning microvalve. Opening and closing are managed by turning a steel rod, with a diameter of 250 µm. The actuation energy for opening and closing the valve is 0.15 mJ, and when closed the valve withstands pressures higher than 0.7 MPa.

The valve design in combination with studies of the scaling behavior of friction and sealing shows the feasibility of low-energy turning microvalves with a high-pressure seal. For an appropriate parameter range we show that the friction force scales linearly with the apparent contact area and with the relative radial displacement of the elastic channel walls.

Finally, our results illustrate the necessity of parameter control in order to develop a robust valve with the benefits of down-scaling.