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Journal article

An efficient rough-interface scattering model for embedded nano-structures

By Karamehmedović, Mirza1; Hansen, Poul-Erik2; Wriedt, Thomas3

From

Foundation Institute of Materials Science (IWT), Department of Production Engineering, University of Bremen, Badgasteiner Str. 3, 28359 Bremen, Germany1

Danish Fundamental Metrology, Technical University of Denmark, Matematiktorvet 307, DK-2800 Kgs. Lyngby, Denmark2

Institut für Werkstofftechnik, Badgasteiner Str 3, 28359 Bremen, Germany3

Highlights► We model forward scattering by nanostructures on rough substrates. ► The roughness model allows a simple, one-interface scattering formulation. ►The scattering model is validated against experimental data.

Language: English
Year: 2012
Pages: 51-56
ISSN: 18792731 and 00406090
Types: Journal article
DOI: 10.1016/j.tsf.2012.11.048
Keywords

Embedded nanostructures Rough surface Scattering

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