Conference paper
Performance assessment of a low-cost spinner design
Diode Lasers and LED Systems, Department of Photonics Engineering, Technical University of Denmark1
Department of Photonics Engineering, Technical University of Denmark2
Copenhagen Nanosystems ApS3
Department of Physics, Technical University of Denmark4
Nanomaterials and Devices, Department of Physics, Technical University of Denmark5
Resist-based lithography require the application of a layer of sacrificial resist for lift-off, etch masking or similar processes. Typical clean-room based resist spinners are expensive, and being situated in a clean room places strict requirements on sample cleanliness and materials compatibility. As a result, there is a strong need for low cost spinner systems outside of traditional cleanroom environments for development and fast device prototyping purposes.
Such systems would enable application of thin resist layers for microfabrication prototyping in the academic, educational and hobbyist communities, with a low-cost barrier for entry
| Language: | English |
|---|---|
| Year: | 2018 |
| Proceedings: | 44th International conference on Micro and Nano Engineering |
| Types: | Conference paper |
| ORCIDs: | Whelan, Patrick Rebsdorf and Booth, Tim |
