Conference paper
Accurate micro Hall effect measurements on scribe line pads
Magnetic Systems Group, LabChip Section, Department of Micro- and Nanotechnology, Technical University of Denmark1
LabChip Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
Department of Micro- and Nanotechnology, Technical University of Denmark3
Nanointegration Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark4
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark5
Silicon Microtechnology Group, MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark6
MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark7
Center for Individual Nanoparticle Functionality, Centers, Technical University of Denmark8
Center for Nanoteknologi, Centers, Technical University of Denmark9
Hall mobility and sheet carrier density are important parameters to monitor in advanced semiconductor production. If micro Hall effect measurements are done on small pads in scribe lines, these parameters may be measured without using valuable test wafers. We report how Hall mobility can be extracted from micro four-point measurements performed on a rectangular pad.
The dimension of the investigated pad is 400 × 430 ¿m2, and the probe pitches range from 20 ¿m to 50 ¿m. The Monte Carlo method is used to find the optimal way to perform the Hall measurement and extract Hall mobility most accurate in less than a minute. Measurements are performed on shallow trench isolation patterned silicon wafers to verify the results from the Monte Carlo method.
| Language: | English |
|---|---|
| Publisher: | IEEE |
| Year: | 2009 |
| Pages: | 157-162 |
| Proceedings: | 17th International Conference on Advanced Thermal Processing of Semiconductors RTP09 |
| ISBN: | 1424438144 , 9781424438143 , 1424438152 and 9781424438150 |
| ISSN: | 1944026x and 19440251 |
| Types: | Conference paper |
| DOI: | 10.1109/RTP.2009.5373450 |
| ORCIDs: | Petersen, Dirch Hjorth and Hansen, Ole |
Charge carrier density Current measurement Electrical resistance measurement Hall effect Hall mobility Insulation Magnetic field measurement Monte Carlo method Monte Carlo methods Performance evaluation Probes Si Testing Transistors carrier density elemental semiconductors isolation technology microHall effect measurements microfour-point measurements patterned silicon wafers rectangular pad scribe line pads semiconductor production shallow trench isolation sheet carrier density silicon
