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10 items by relevance
1 Journal article

Opto-mechanical accelerometer based on strain sensing by a Bragg grating in a planar waveguide

Larsen, Torben Storgaard; Leistiko, Otto; Bouwstra, Siebe

Sensors and Actuators A: Physical — 1996, Volume 52, pp. 25-32

Year: 1996

Language: English

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kgjcpa obfdenlh im
2 Journal article

Opto-mechanical accelerometer based on strain sensing by a Bragg grating in a planar waveguide

Storgaard-Larsen, Torben; Bouwstra, Siebe; Leistiko, Otto

Sensors and Actuators A-physical — 1996, Volume 52, Issue 1-3, pp. 25-32

a silicon opto-mechanical accelerometer based on strain sensing by a Bragg grating in a planar waveguide. The fabrication of the accelerometer includes KOH wet etching of (110) silicon, controlling stress in PECVD glass waveguides and direct UV writing of Bragg gratings.

Year: 1996

Language: English

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dh gobpnelfj km aci

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