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Journal article

Design and fabrication of in-plane AFM probes with sharp silicon nitride tips based on refilling of anisotropically etched silicon moulds

Language: Undetermined
Publisher: IOP Publishing
Year: 2014
Pages: 105013
ISSN: 13616439 and 09601317
Types: Journal article
DOI: 10.1088/0960-1317/24/10/105013

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