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Conference paper

Optimized SU-8 pyrolysis for fabrication of pyrolytic carbon microelectrodes

From

Department of Micro- and Nanotechnology, Technical University of Denmark1

Nanocarbon, Department of Micro- and Nanotechnology, Technical University of Denmark2

Biomaterial Microsystems, Department of Micro- and Nanotechnology, Technical University of Denmark3

Language: English
Year: 2016
Proceedings: 42nd International conference on Micro and Nano Engineering
Types: Conference paper
ORCIDs: Petersen, Dirch Hjorth , Alstrøm, Tommy Sonne and Keller, Stephan Sylvest

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Analysis