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Conference paper

Multi Degrees of Freedom Electro-Thermal Microactuators

In Proceedings of the 10th International Conference on Solid-state Sensors and Actuators — 1999, pp. 1372-1375

By Jonsmann, Jacques1; Sigmund, Ole2; Bouwstra, Siebe1

From

Department of Micro- and Nanotechnology, Technical University of Denmark1

Department of Solid Mechanics, Technical University of Denmark2

Language: English
Publisher: The Institute of Electrical Engineers of Japan
Year: 1999
Pages: 1372-1375
Proceedings: 10th International Conference on Solid-State Sensors and Actuators (Transducers ’99)
Types: Conference paper
ORCIDs: Sigmund, Ole

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