Journal article
Fabrication of biopolymer cantilevers using nanoimprint lithography
Nanoprobes Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark1
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
Department of Micro- and Nanotechnology, Technical University of Denmark3
Polymer Micro & Nano Engineering, Department of Micro- and Nanotechnology, Technical University of Denmark4
Solar Energy Programme, Risø National Laboratory for Sustainable Energy, Technical University of Denmark5
Risø National Laboratory for Sustainable Energy, Technical University of Denmark6
The biodegradable polymer poly(l-lactide) (PLLA) was introduced for the fabrication of micromechanical devices. For this purpose, thin biopolymer films with thickness around 10 μm were spin-coated on silicon substrates. Patterning of microcantilevers is achieved by nanoimprint lithography. A major challenge was the high adhesion between PLLA and silicon stamp.
Optimized stamp fabrication and the deposition of a 125 nm thick fluorocarbon anti-stiction coating on the PLLA allowed the fabrication of biopolymer cantilevers. Resonance frequency measurements were used to estimate the Young’s modulus of the device material.
| Language: | English |
|---|---|
| Year: | 2011 |
| Pages: | 2294-2296 |
| ISSN: | 18735568 and 01679317 |
| Types: | Journal article |
| DOI: | 10.1016/j.mee.2011.02.095 |
| ORCIDs: | Keller, Stephan Sylvest , Feidenhans'l, Nikolaj Agentoft and Boisen, Anja |
Biopolymer Cantilever Fluorocarbon coating Nanoimprint lithography (NIL) PLLA
