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Conference paper

Improvement of the Release Yield of SU-8 Micro-Particle Filters by an additional ASE etch Step

By Noeth, Nadine-Nicole1,2,3; Keller, Stephan Urs1,2,3; Boisen, Anja1,2,3

From

Nanoprobes Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark1

NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2

Department of Micro- and Nanotechnology, Technical University of Denmark3

Language: English
Year: 2008
Proceedings: Int. Conference on Micro- and Nanoengineering
Types: Conference paper
ORCIDs: Keller, Stephan Urs and Boisen, Anja

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