Journal article
Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry
Miniaturization of cantilever dimensions will increase both the mass and spatial resolution of a resonating cantilever-based mass sensor, which monitors the mass change of the cantilever by measuring its resonant frequency shift. A fabrication method for nanometer-sized cantilevers with electrostatic excitation and integrated capacitive readout is introduced.
The dynamic behavior of the nanometer-sized cantilever is characterized at atmospheric pressure using optical microscopy and in vacuum using scanning electron microscopy (SEM). A monolithic integration method for combining the nano-cantilevers with CMOS circuitry is described in detail. The circuitry is used to enhance the capacitive readout.
The fabrication results, showing integrated nano-cantilevers with a CMOS analog amplification circuit, are presented along with preliminary electrical characterization of the device.
Language: | English |
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Year: | 2003 |
Pages: | 311-319 |
ISSN: | 18733069 and 09244247 |
Types: | Journal article |
DOI: | 10.1016/S0924-4247(03)00208-5 |
ORCIDs: | Hansen, Ole and Boisen, Anja |