Traceability of Dimensional Measurements using the Scanning Electron Microscope

its unique combination of three imaging properties: • Lateral ultimate resolution down to 2 nm • Large range of possible magnification levels ranging from a few hundred times to hundred thousand times magnification • Large depth of field Topography reconstruction with this instrument and photogrammetric techniques has been known for a long time [1] [2].

Nowadays, the availability of digital SEMs and the advances in computer technology have made it possible to implement such algorithms to the reconstruction of continuous three dimensional data sets. In this work, a theoretical and experimental investigation is presented that addresses the performance of 3D topography calculation based on secondary electron imaging and the stereo-pair technique.