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Phrase: "water pump control" (does not work with wildcards)
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Conference paper

Grey scale electron beam lithography in functionalized SU-8 for active optical devices

In Proceedings of Spie — 2006, pp. 69-76

By Balslev, Søren1,2; Rasmussen, Torben2,3; Shi, P.; Kristensen, Anders1,2

From

Lab-on-a-Chip, Department of Micro- and Nanotechnology, Technical University of Denmark1

Department of Micro- and Nanotechnology, Technical University of Denmark2

Microreactors, Department of Micro- and Nanotechnology, Technical University of Denmark3

Language: English
Year: 2006
Pages: 69-76
Proceedings: SPIE's Photonics West MOEMS/MEMS 2006
Types: Conference paper
ORCIDs: Kristensen, Anders

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