Conference paper
Contact dynamics for micro acoustic devices
Solid Mechanics, Department of Civil and Mechanical Engineering, Technical University of Denmark1
Centre for Acoustic-Mechanical Microsystems, Centers, Technical University of Denmark2
Department of Civil and Mechanical Engineering, Technical University of Denmark3
Acoustic Technology, Department of Electrical and Photonics Engineering, Technical University of Denmark4
Department of Electrical and Photonics Engineering, Technical University of Denmark5
Language: | English |
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Year: | 2022 |
Proceedings: | DCAMM Symposium 2022 |
Types: | Conference paper |
ORCIDs: | Soleimani, Hossein , Aage, Niels , Brunskog, Jonas and Lucklum, Frieder |