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Book chapter

Techniques in Scanning Acoustic Microscopy for Enhanced Failure and Material Analysis of Microsystems

In Mems/nems — 2006, pp. 905-921

By Janting, J.

From

DELTA, Danish Electronics Light & Acoustics, Venlighedsvej 4, 2970, Hoersholm, Denmark

Acoustic microscopy is a widely used Non Destructive Testing (NDT) method for micro-inspection. Introductions to ultrasonic NDT in general and acoustic microscopy is given in [1]–[5] and [6]–[9] respectively.

Language: English
Publisher: Springer US
Year: 2006
Pages: 905-921
Journal subtitle: Handbook Techniques and Applications
ISBN: 0387245200 , 0387257861 , 1601194560 , 9780387245201 , 9780387257860 and 9781601194565
Types: Book chapter
DOI: 10.1007/0-387-25786-1_23
Keywords

Acoustic Impedance Acoustic Microscopy Flip Chip Focal Spot Size Surface Acoustic Wave

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