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Conference paper

Laser and AFM lithography on aluminum: a toolbox for fabrication of nanoelectromechanical structures

In Laser and Afm Lithography on Aluminum: a Toolbox for Fabrication of Nanoelectromechanical Structures — 1999, pp. 337-338
From

Department of Micro- and Nanotechnology, Technical University of Denmark1

Language: English
Year: 1999
Pages: 337-338
Proceedings: 10th International Conference on Scanning Tunneling Microscopy/Spectroscopy and Related Proximal Probe Microscopy
Types: Conference paper
ORCIDs: Boisen, Anja and Hansen, Ole

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