Journal article
Nanoimprinting reflow modified moth-eye structures in chalcogenide glass for enhanced broadband antireflection in the mid-infrared
Nanofabrication, National Centre for Nano Fabrication and Characterization, Technical University of Denmark1
Polymer Microsystems, Nanofabrication, National Centre for Nano Fabrication and Characterization, Technical University of Denmark2
National Centre for Nano Fabrication and Characterization, Technical University of Denmark3
Department of Chemistry, Technical University of Denmark4
We report on the progress towards developing a new method for fabricating more efficient, broadband antireflective (AR) moth-eye structures in As2Se3 via a direct nanoimprinting technique. Thermal reflow is used during mold fabrication to reshape a conventional deep-ultraviolet lithography in order to promote a pattern transfer of “secant ogive”-like moth-eye structures.
Once replicated, structures modified by reflow displayed greater AR efficiency compared to structures replicated by a conventional mold, achieving the highest spectrum-averaged transmittance improvement of 12.36% from 3.3 to 12 μm.
| Language: | English |
|---|---|
| Year: | 2019 |
| Pages: | 4383-4386 |
| ISSN: | 15394794 and 01469592 |
| Types: | Journal article |
| DOI: | 10.1364/OL.44.004383 |
| ORCIDs: | Lotz, Mikkel , Taboryski, Rafael , Needham, Julius and Jakobsen, Mogens H. |
