Journal article
Determination of negative-ion and electron parameters in an Ar/SF6 plasma
A new method for evaluating negative ion and electron parameters from the current–voltage characteristics of electric probes is presented. A theoretical model and its related numerical procedures are established and errors included are estimated. Temperatures and densities of negative ions and electrons in a magnetic multipolar-confined plasma of Ar and Ar/SF6 mixtures are determined with allowable errors for various density ratios of the negative ion to the electron.
Language: | Undetermined |
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Publisher: | American Institute of Physics |
Year: | 1998 |
Pages: | 2450-2458 |
ISSN: | 10897550 and 00218979 |
Types: | Journal article |
DOI: | 10.1063/1.368406 |