Conference paper
AFM probe with piezoresistive read-out and highly symmetrical wheatstone bridge arrangement
Language: | English |
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Publisher: | The Institute of Electrical Engineers of Japan |
Year: | 1999 |
Pages: | 1852-1855 |
Proceedings: | 10th International Conference on Solid-State Sensors and Actuators (Transducers ’99) |
Types: | Conference paper |
ORCIDs: | Boisen, Anja and Hansen, Ole |