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Journal article · Conference paper
Sputtering of solid nitrogen by keV helium ions 10.1016/0168-583X(93)95798-A
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions With Materials and Atoms — 1993, Volume 78, Issue 1-4, pp. 192-197
Solid nitrogen has become a standard material among the frozen molecular gases for electronic sputtering. We have combined measurements of sputtering yields and energy spectra from nitrogen bombarded by 4-10 keV helium ions. The data show that the erosion is electronic rather than knockon
Year: 1993
Language: English
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