Journal article
A novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides
Department of Micro- and Nanotechnology, Technical University of Denmark1
Nanoprobes Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark3
We present a novel bonding technique developed for the fabrication of a cantilever-based biosensing system with integrated optical read-out. The read-out mechanism is based on single-mode waveguides fabricated monolithically in SU-8. For optimal operation of the read-out mode, the cantilever waveguides should be homogenous and this bonding technique ensures free-hanging cantilevers that are surrounded by the same material for bottom and top claddings.
The bonding step is necessary because SU-8 is a negative resist where free-hanging structures cannot be fabricated directly. This paper gives details on the processing aspects and the parameters of the fabrication steps.
Language: | English |
---|---|
Year: | 2008 |
Pages: | 015017 |
ISSN: | 13616439 and 09601317 |
Types: | Journal article |
DOI: | 10.1088/0960-1317/18/1/015017 |
ORCIDs: | Hübner, Jörg and Boisen, Anja |